The nAccel 100LT is a fully automated high volume manufacturing tool. The control software is designed with a touch screen Human Machine Interface (HMI). The use of the tool is recipe driven for operator convenience, and has full process control monitoring. The optional data server can be networked for easy access to historical data. Rockwell Automation control software was chosen for its field proven and industry accepted reliability. The core of the nAccel 100LT technology is a vacuum based particle accelerator. Industry recognized vacuum pumps, valves and gauges are utilized for the entire multi-stage vacuum systems. An exceptionally robust high voltage power supply package provides the beam generation assemblies with their required power; while the highly controlled gas delivery system incorporates high purity stainless steel componentry.
The nAccel 100LT utilizes a manual magnetic linear feed through, mounted on a process chamber with integrated load port, which can accommodate 2.5cm2 samples up to 10mm thick. An optional 3 axis automated scanner is available for use on the nAccel 100LT.
Beam Types: Energetic argon Gas Cluster Ion Beam (GCIB) and Accelerated Neutral argon gas Atom Beam (ANAB)
Beam Line Base Pressure: <1E-6 Torr
Sample Manipulator Vacuum Base Pressure: <2E-3 Torr
Gas delivery system for GCIB/ANAB beam generation: 50 – 500 sccm Ar
Engine Module vacuum pressure during beam operation: <9E-5 Torr at gas flows to 250 sccm
Sample Manipulator vacuum press. during beam operation: <9E-5 Torr
GCIB/ANAB Beam Acceleration Potential: 10 – 30 kV
GCIB/ANAB Beam Fluxes: 5E14 – 1E16 atoms/second
Maximum substrate size: 25mm square x 10mm thick